The lecture titled Introduction into spectroscopic ellipsometry – Complex sample analysis in a wide spectral range from DUV to NIR will be delivered by Dr Sven Peters (SENTECH Instruments GmbH, Berlin, Germany).
Ellipsometry is a contactless, nondestructive, widely used optical measurement technique for the determination of thickness and optical constants (refractive index n and extinction coefficient κ) of materials of substrates or in layer stacks. It is used as well in research and industrial quality control. An introduction into the theory of this versatile method and ellipsometric workflow will be given as well as a presentation of selected applications. These applications cover a range from simple single film applications to complex multilayer material analysis from the DUV to NIR spectral range. Also temperature dependent measurements, a combination of ellipsometry with complementary techniques and spatial resolved measurements will be shown.